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ISSP 2026
Invited speakers

Keynote lectures

High Power Impulse Magnetron Sputtering: From Fundamental Concepts to Industrial Applications

Analysis of heating processes during film growth by sputter deposition

Invited lectures

Sputtering Atomic Layer Augmented Deposition (SALAD): A Versatile Approach
to Tailor Dielectric/Metal Systems for Cross-Disciplinary Optical Applications

Defect- and Interface-Engineered Ceramic Thin Films for Extreme Environments

Epitaxial growth of polar, semipolar, and nonpolar ScGaN films

Plasma process design and for sustainable solutions

Manipulating spokes in magnetron sputtering discharges

Controlled Growth of Sculptured Thin Films via Sputtering-GLAD for Advanced Sensing Applications

A Comparative Study on Microstructure and Mechanical Properties of RFMS and HiPIMS Mo-based Nitride Coatings

Real-time monitoring of stress evolution during sputter-deposition of elemental and alloy thin films

The high power impulse magnetron sputtering discharge

ISSP2026 
Secretariat

Tokyo Metropolitan University,
6-6 Asahigaoka, Hinoshi

Tokyo, 191-0065

secretariat@issp-jvss.org

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ISSP2026, The Japan Society of Vacuum and Surface Science. All Rights Reserved.

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